Recent developments towards low-cost MEMS spectrometers

Dilusha K. K. M. B. Silva; Dhirendra Tripathi; Haifeng Mao; Jarek Antoszewski; Brett D. Nener; John M. Dell; Lorenzo Faraone

doi:10.1117/12.2053505

21 May 2014 Recent developments towards low-cost MEMS spectrometers

Dilusha K. K. M. B. Silva, Dhirendra Tripathi, Haifeng Mao, Jarek Antoszewski, Brett D. Nener, John M. Dell, Lorenzo Faraone

Author Affiliations +

Proceedings Volume 9101, Next-Generation Spectroscopic Technologies VII; 910108 (2014) https://doi.org/10.1117/12.2053505
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

While optical spectroscopy has shown great promise in a multitude of applications, the cost, size, and fragility of spectrometer instruments have hindered widespread application of the technology. :tvfEMS microspectrometers offer great hope for low-cost, lightweight, and robust spectrometers, paving the way for pervasive use in many fields. In this invited paper, we report on nearly 15 years of development on MEMS spectrometers in our research group, beginning with devices designed for the shortwave infrared (SWIR) and midwave infrared (MWIR), and moving on to our most recent work towards MEMS spectrometers in the visible and near infrared (NIR) as well as the thermal long-wave infrared (LWIR) bands.

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Dilusha K. K. M. B. Silva, Dhirendra Tripathi, Haifeng Mao, Jarek Antoszewski, Brett D. Nener, John M. Dell, and Lorenzo Faraone "Recent developments towards low-cost MEMS spectrometers", Proc. SPIE 9101, Next-Generation Spectroscopic Technologies VII, 910108 (21 May 2014); https://doi.org/10.1117/12.2053505

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