Miniaturization and cost reduction of spectrometer and sensor technologies has great potential to open up new
applications areas and business opportunities for analytical technology in hand held, mobile and on-line applications.
Advances in microfabrication have resulted in high-performance MEMS and MOEMS devices for spectrometer
applications. Many other enabling technologies are useful for miniature analytical solutions, such as silicon photonics,
nanoimprint lithography (NIL), system-on-chip, system-on-package techniques for integration of electronics and
photonics, 3D printing, powerful embedded computing platforms, networked solutions as well as advances in
This paper will summarize recent work on spectrometer and sensor miniaturization at VTT Technical Research Centre of
Finland. Fabry-Perot interferometer (FPI) tunable filter technology has been developed in two technical versions: Piezoactuated
FPIs have been applied in miniature hyperspectral imaging needs in light weight UAV and nanosatellite
applications, chemical imaging as well as medical applications. Microfabricated MOEMS FPIs have been developed as
cost-effective sensor platforms for visible, NIR and IR applications. Further examples of sensor miniaturization will be
discussed, including system-on-package sensor head for mid-IR gas analyzer, roll-to-roll printed Surface Enhanced
Raman Scattering (SERS) technology as well as UV imprinted waveguide sensor for formaldehyde detection.