Full-field step profile measurement with sinusoidal wavelength scanning interferometer

Samuel Choi; Osami Sasaki; Takamasa Suzuki

doi:10.1117/12.2053539

28 May 2014 Full-field step profile measurement with sinusoidal wavelength scanning interferometer

Samuel Choi, Osami Sasaki, Takamasa Suzuki

Proceedings Volume 9110, Dimensional Optical Metrology and Inspection for Practical Applications III; 91100F (2014) https://doi.org/10.1117/12.2053539
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

A sinusoidal wavelength scanning interferometer is proposed for 3-D profile measurement. The interference phase-shift signal generated by the sinusoidal wavelength scanning contains information of optical path difference (OPD) covering nm-mm scale structure. The interference phase-shift signal was obtained by the four-step phase shifting method. The sinusoidal wavelength shifting bandwidth of 5.7 nm with a frequency of approximately 180 Hz was performed by the Littman-Metcalf external resonator-type tunable laser with a center of 772.1 nm. The full-field step-height surface profile measurement and 3-D surface measurement were conducted by a CCD image sensor with an accuracy of few tens nm. The surface profile of gauge blocks with a step-height of up to 10 μm was successfully measured.

Citation Download Citation

Samuel Choi, Osami Sasaki, and Takamasa Suzuki "Full-field step profile measurement with sinusoidal wavelength scanning interferometer", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100F (28 May 2014); https://doi.org/10.1117/12.2053539

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available