Paper
28 May 2014 Optical center alignment technique based on inner profile measurement method
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Abstract
Center alignment is important technique to tune up the spindle of various precision machines in manufacturing industry. Conventionally such a tool as a dial indicator has been used to adjust and to position the axis by manual operations of a technical worker. However, it is not easy to precisely control its axis. In this paper, we developed the optical center alignment technique based on inner profile measurement using a ring beam device. In this case, the center position of the cylinder hole can be determined from circular profile detected by optical sectioning method using a ring beam device. In our trials, the resolution of the center position is proved less than 10 micrometers in extreme cases. This technique is available for practical applications in machine tool industry.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toshitaka Wakayama and Toru Yoshizawa "Optical center alignment technique based on inner profile measurement method", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100I (28 May 2014); https://doi.org/10.1117/12.2050892
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KEYWORDS
Optical alignment

CCD cameras

Ellipsometry

Semiconductor lasers

Beam shaping

Mirrors

Optics manufacturing

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