The effects of gamma irradiation on micro-hotplates with integrated temperature sensing diodes

Laurent A. Francis; Nicolas André; El Hafed Boufouss; Pierre Gérard; Zeeshan Ali; Florin Udrea; Denis Flandre

doi:10.1117/12.2050734

4 June 2014 The effects of gamma irradiation on micro-hotplates with integrated temperature sensing diodes

Laurent A. Francis, Nicolas André, El Hafed Boufouss, Pierre Gérard, Zeeshan Ali, Florin Udrea, Denis Flandre

Proceedings Volume 9113, Sensors for Extreme Harsh Environments; 911302 (2014) https://doi.org/10.1117/12.2050734
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

Micro-hotplates are MEMS structures of interest for low-power gas sensing, lab-on-chips and space applications, such as micro-thrusters. Micro-hotplates usually consist in a Joule heater suspended on a thin-film membrane while thermopiles or thermodiodes are added as temperature sensors and for feedback control. The implementation of micro-hotplates using a Silicon-On-Insulator technology makes them suited for co-integration with analog integrated circuits and operation at elevated environmental temperatures in a range from 200 to 300 °C, while the heater allows thermal cycling in the kHz regime up to 700 °C, e.g. necessary for the activation of gas sensitive metal-oxide on top of the membrane, with mWrange electrical power. The demonstrated resistance of micro-hotplates to gamma radiations can extend their use in nuclear plants, biomedical sterilization and space applications. In this work, we present results from electrical tests on micro-hotplates during their irradiation by Cobalt-60 gamma rays with total doses up to 18.90 kGy. The micro-hotplates are fabricated using a commercial 1.0 μm Silicon-On-Insulator technology with a tungsten Joule heater, which allows power-controlled operation above 600 °C with less than 60 mW, and temperature sensing silicon diodes located on the membrane and on the bulk. We show the immunity of the sensing platform to the harsh radiation environment. Beside the good tolerance of the thermodiodes and the membrane materials to the total radiation dose, the thermodiode located on the heating membrane is constantly annealed during irradiation and keeps a constant sensitivity while post-irradiation annealing can restore the thermodiode.

Citation Download Citation

Laurent A. Francis, Nicolas André, El Hafed Boufouss, Pierre Gérard, Zeeshan Ali, Florin Udrea, and Denis Flandre "The effects of gamma irradiation on micro-hotplates with integrated temperature sensing diodes", Proc. SPIE 9113, Sensors for Extreme Harsh Environments, 911302 (4 June 2014); https://doi.org/10.1117/12.2050734

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