Mechanical properties of MEMS materials: reliability investigations by mechanical- and HRXRD-characterization related to environmental testing

T. Bandi; H. Shea; A. Neels

doi:10.1117/12.2050617

5 June 2014 Mechanical properties of MEMS materials: reliability investigations by mechanical- and HRXRD-characterization related to environmental testing

T. Bandi, H. Shea, A. Neels

Author Affiliations +

Proceedings Volume 9113, Sensors for Extreme Harsh Environments; 911309 (2014) https://doi.org/10.1117/12.2050617
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

The performance and aging of MEMS often rely on the stability of the mechanical properties over time and under harsh conditions. An overview is given on methods to investigate small variations of the mechanical properties of structural MEMS materials by functional characterization, high-resolution x-ray diffraction methods (HR-XRD) and environmental testing. The measurement of the dynamical properties of micro-resonators is a powerful method for the investigation of elasticity variations in structures relevant to microtechnology. X-ray diffraction techniques are used to analyze residual strains and deformations with high accuracy and in a non-destructive manner at surfaces and in buried micro-structures. The influence of elevated temperatures and radiation damage on the performance of resonant microstructures with a focus on quartz and single crystal silicon is discussed and illustrated with examples including work done in our laboratories at CSEM and EPFL.

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T. Bandi, H. Shea, and A. Neels "Mechanical properties of MEMS materials: reliability investigations by mechanical- and HRXRD-characterization related to environmental testing", Proc. SPIE 9113, Sensors for Extreme Harsh Environments, 911309 (5 June 2014); https://doi.org/10.1117/12.2050617

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