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2 May 2014 Wide band, wide angular width wire-grid polarizer using galvanic growth technology
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Abstract
Functional demonstration of a wide band, wide angular width “wire-grid polarizer” has been made in the framework of a User Project of the European project ACTMOST (Access To Micro-Optics Expertise, Services and Technologies). The polarization function relies upon linear polarizers using the “wire-grid” polarizer principle by means of a metal grating of unusually large period, exhibiting a large extinction of the transmission of the TE polarization in the 850 nm wavelength range. This grating achieves a broadband and especially high angular aperture reflection with low loss and permits resorting to very low cost incoherent light sources of the transmitted TM polarization. The paper will describe the design, the modeling optimization, and the complete technological process chain which has been used: from the photoresist grating printing using phasemask UV-based lithography to the uniform galvanic growth of very shallow gold grating on transparent conductive layer deposited on a glass substrate. Transmission curves for both polarizations on the first demonstrators will be presented.
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Yves Jourlin, Markus Guttmann, Frédéric Lacour, Janne Laukkanen, Koceila Yadel, Frédéric Celle, Colette Veillas, Thomas Kämpfe, Barbara Matthis, and Olivier Parriaux "Wide band, wide angular width wire-grid polarizer using galvanic growth technology", Proc. SPIE 9130, Micro-Optics 2014, 913008 (2 May 2014); https://doi.org/10.1117/12.2051429
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