Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board

Jung Woon Lim; Seon Hoon Kim; Jong-Sup Kim; Jeong Ho Kim; Yune Hyoun Kim; Ju Young Lim; Young-Eun Im; Jong Bok Park; Swook Hann

doi:10.1117/12.2049681

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1 May 2014 Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board

Jung Woon Lim, Seon Hoon Kim, Jong-Sup Kim, Jeong Ho Kim, Yune Hyoun Kim, Ju Young Lim, Young-Eun Im, Jong Bok Park, Swook Hann

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Proceedings Volume 9132, Optical Micro- and Nanometrology V; 913215 (2014) https://doi.org/10.1117/12.2049681
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

In this study, we proposed and fabricated optical sensor module integrated onto optical-electrical printed circuit board (PCB) for gas detection based on polymer waveguide with tin oxide thin film. Their potential application as gas sensors are confirmed through computational simulation using the two dimensional finite-difference time-domain method (2DFDTD). Optical-electrical PCB was integrated into vertical cavity surface emitting laser (VCSEL), photodiode and polymeric sensing device was fabricated by the nano-imprint lithography technique. SnO₂ thin film of 100nm thickness was placed on the surface of core layer exposed by removing the specific area of the upper cladding layer of 300 μm length and 50 μm width. The performance of the device was measured experimentally. Initial study on the sensor performance for carbon monoxide gas detection indicated good sensitivity.

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Jung Woon Lim, Seon Hoon Kim, Jong-Sup Kim, Jeong Ho Kim, Yune Hyoun Kim, Ju Young Lim, Young-Eun Im, Jong Bok Park, and Swook Hann "Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 913215 (1 May 2014); https://doi.org/10.1117/12.2049681

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