In-beam tracking refractometry for coordinate interferometric measurement

Miroslava Holá; Josef Lazar; Ondřej Číp; Zdeněk Buchta

doi:10.1117/12.2052920

1 May 2014 In-beam tracking refractometry for coordinate interferometric measurement

Miroslava Holá, Josef Lazar, Ondřej Číp, Zdeněk Buchta

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 91321K (2014) https://doi.org/10.1117/12.2052920
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

We propose to extend the principle of compensation of the fluctuations of the refractive index of air through monitoring the optical length within the measuring range of the displacement measuring interferometer. The concept is derived form a tracking refractometry evaluating the refractive index of air in the beam axis coinciding with the positioning interferometer. Application of this approach in multi-axis positioning and measurement mans to compromise the principle of spatial unity of the displacement measuring laser beam and the beam of the tracking refractometer. In this contribution we evaluate the level of uncertainty associated with the spatial shift of these two beams. Consequently the nature of the fluctuations of the refractive index of air in laser interferometry is investigated and discussed with the focus on potential applications in coordinate measuring systems and long-range metrological scanning probe microscopy systems.

Citation Download Citation

Miroslava Holá, Josef Lazar, Ondřej Číp, and Zdeněk Buchta "In-beam tracking refractometry for coordinate interferometric measurement", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91321K (1 May 2014); https://doi.org/10.1117/12.2052920

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