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24 July 2014 Characterising x-ray mirror deformations with a phase measuring deflectometry system
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MPE is developing modular x-ray mirrors for the next generation of high-energy astronomy missions. The mirror segments are based on thermally formed (a.k.a. slumped) glass sheets, with a typical thickness of 400µm. One of the major challenges is the alignment and integration of the mirror segments and the associated metrology. The optical performance of the mirror can be significantly compromised by adhesive shrinkage, gravity sag or residual stresses influenced by the properties of the mirror mounting and the integration procedure. In parallel with classic coordinate measurement techniques we utilize a deflectometry based metrology system to characterization shape errors of the mirror surfaces. A typical deflectometry setup uses a TFT display to project a sinusoidal pattern onto a specular test surface (SUT) and a camera that observes the reflected image. This reflected image contains slope information of the SUT in the form of distortions of the original displayed pattern. A phase shifting technique can be used to recover this slope information with only very few exposures and reasonable computational effort. The deflectometry system enables us to characterize bonding interfaces of slumped glass mirrors, as well as influence of temporary mounting points, handling and thermal distortions. It is also well suited to measure transient effects.
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E. Breunig, P. Friedrich, L. Proserpio, and A. Winter "Characterising x-ray mirror deformations with a phase measuring deflectometry system", Proc. SPIE 9144, Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray, 914449 (24 July 2014);

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