Focal Plane Arrays (FPA) are key items for modern astronomical observations in the near infrared wavelength, but it is very expensive and not easy to get them. Less expensive NIR FPAs with reasonable performance are very important to spread NIR observation extensively. FPA640×512 manufactured by Chunghwa Leading Photonics Tech is a 640×512 InGaAs detector covering the 0.9-1.7 μm wavelength. Since this array is significantly cheaper than the commonly used NIR FPAs in the astronomical observation, it is possible to be a good choice for particular projects which do not need many pixels, if FPA640×512 has acceptable performance for the purpose. We have evaluated one test grade array of FPA640×512 both in the room and low temperature environment. In order to evaluate the characteristics of this FPA in the low temperature environment, we cooled it down by the mechanical refrigerator and confirmed that it works at 100 K. We have found that the dark current reduces exponentially as the FPA temperature decreases, but it hits the bottom at~1000 e−/sec bellow 200 K with the default setting. We are trying to reduce the dark current by optimizing the bias voltage and the current to the MUX circuit. The latest experiments have shown the possibility that the dark current decreases to~200 e−/sec. This value is still higher than that of NIR FPAs used in the scientific observation, but it may be applicable for the particular purpose, for example, FPAs for slit viewer in spectrometers, wave front sensor, and so on.