Optical fiber Fabry-Pérot sensor fabrication based on focused ion beam post-processing

Ricardo M. Andre; Simon Pevec; Martin Becker; Jan Dellith; Manfred Rothhardt; Manuel B. Marques; Denis Donlagic; Hartmut Bartelt; Orlando Frazão

doi:10.1117/12.2059175

2 June 2014 Optical fiber Fabry-Pérot sensor fabrication based on focused ion beam post-processing

Ricardo M. Andre, Simon Pevec, Martin Becker, Jan Dellith, Manfred Rothhardt, Manuel B. Marques, Denis Donlagic, Hartmut Bartelt, Orlando Frazão

Author Affiliations +

Proceedings Volume 9157, 23rd International Conference on Optical Fibre Sensors; 91577T (2014) https://doi.org/10.1117/12.2059175
Event: OFS2014 23rd International Conference on Optical Fiber Sensors, 2014, Santander, Spain

Abstract

A combination of focused ion beam milling and chemical etching is proposed for the creation of Fabry-Pérot cavities in microwires. Both simple cavities and cantilevers are created on 15 μm-diameter microwires and characterized in temperature. The cantilever structure shows sensitivity to vibration and is capable of measuring frequencies in the range 1 Hz – 40 kHz.

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Ricardo M. Andre, Simon Pevec, Martin Becker, Jan Dellith, Manfred Rothhardt, Manuel B. Marques, Denis Donlagic, Hartmut Bartelt, and Orlando Frazão "Optical fiber Fabry-Pérot sensor fabrication based on focused ion beam post-processing", Proc. SPIE 9157, 23rd International Conference on Optical Fibre Sensors, 91577T (2 June 2014); https://doi.org/10.1117/12.2059175

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