Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition

Sung Jun Jang; Alireza Bonakdar; Hooman Mohseni

doi:10.1117/12.2062301

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27 August 2014 Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition

Sung Jun Jang, Alireza Bonakdar, Hooman Mohseni

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Proceedings Volume 9172, Nanostructured Thin Films VII; 91720T (2014) https://doi.org/10.1117/12.2062301
Event: SPIE NanoScience + Engineering, 2014, San Diego, California, United States

Abstract

Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nanocolumnar films depending on polarization properties, and conductivity, respectively.

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Sung Jun Jang, Alireza Bonakdar, and Hooman Mohseni "Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition", Proc. SPIE 9172, Nanostructured Thin Films VII, 91720T (27 August 2014); https://doi.org/10.1117/12.2062301

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