Employment of fluorescence for autofocusing in direct laser writing micro-/nano-lithography

Mangirdas Malinauskas; Albertas Žukauskas; Kastytis Belazaras

doi:10.1117/12.2061261

25 September 2014 Employment of fluorescence for autofocusing in direct laser writing micro-/nano-lithography

Mangirdas Malinauskas, Albertas Žukauskas, Kastytis Belazaras

Proceedings Volume 9192, Current Developments in Lens Design and Optical Engineering XV; 919212 (2014) https://doi.org/10.1117/12.2061261
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Herein we present the implementation of autofocusing in multi-photon Direct Laser Writing (DLW) lithography. It is based on fluorescence occurring within the confined volume of a photopolymer/photoresin excitation resulting to a voxel generation. The proposed method is further successfully employed for the nanofabrication of large scale (500 nm in height, up to 25 mm2 in area) Diffractive Optical Elements (DOE). The produced structures are characterized using Scanning Electron Microscope (SEM) and confocal optical profilometry. The introduced technique is potential for a simple, price and effort efficient upgrade of currently existing DLW micro-/nano-lithography setups.

Citation Download Citation

Mangirdas Malinauskas, Albertas Žukauskas, and Kastytis Belazaras "Employment of fluorescence for autofocusing in direct laser writing micro-/nano-lithography", Proc. SPIE 9192, Current Developments in Lens Design and Optical Engineering XV, 919212 (25 September 2014); https://doi.org/10.1117/12.2061261

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available