A high performance room temperature THz sensor

Janez Trontelj; Gintaras Valušis; Rimvydas Venckevičius; Irmantas Kašalynas; Aleksander Sešek; Andrej Švigelj

doi:10.1117/12.2060692

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5 September 2014 A high performance room temperature THz sensor

Janez Trontelj, Gintaras Valušis, Rimvydas Venckevičius, Irmantas Kašalynas, Aleksander Sešek, Andrej Švigelj

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Proceedings Volume 9199, Terahertz Emitters, Receivers, and Applications V; 91990K (2014) https://doi.org/10.1117/12.2060692
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Resonant THz antenna-coupled micro-bolometers are considered as a potential candidates for room temperature THz imaging, as well as spectroscopic applications. Micromachining technology is found to be well-suitable to fabricate a micro-meter bolometer sensor suitable for MEMS implementation. The sensitivity of the sensor is determined to be up to 1000V/W and the noise equivalent power (NEP) – is down to 5pW /√Hz. The sensor parameters are designed to be easily implemented with a low cost standard preamplifier array which increases the pixel sensitivity to 10⁶V/W without compromising the noise equivalent power.

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Janez Trontelj, Gintaras Valušis, Rimvydas Venckevičius, Irmantas Kašalynas, Aleksander Sešek, and Andrej Švigelj "A high performance room temperature THz sensor", Proc. SPIE 9199, Terahertz Emitters, Receivers, and Applications V, 91990K (5 September 2014); https://doi.org/10.1117/12.2060692

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