Paper
5 September 2014 Attosecond broadband multilayer mirrors for the water window spectral range
A. Guggenmos, S. Radünz, R. Rauhut, M. Hofstetter, S. Venkatesan, A. Wochnik, C. Scheu, E. Gullikson, S. Fischer, B. Nickel, U. Kleineberg
Author Affiliations +
Abstract
Recent advances in the development of attosecond soft X-ray sources ranging into the ‘water window’ spectral range, between the carbon 1s and oxygen 1s states (284 eV - 543 eV), are also driving the development of suited broadband multilayer optics for attosecond beam steering and dispersion management. The relatively low intensity of current High Harmonic Generation (HHG) soft X-ray sources calls for an efficient use of photons, thus the development of low-loss multilayer optics is of uttermost importance. Here, we report about the realization of atomically smooth interfaces in broadband CrSc multilayer mirrors by an optimized ion beam deposition and assisted interface polishing process.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Guggenmos, S. Radünz, R. Rauhut, M. Hofstetter, S. Venkatesan, A. Wochnik, C. Scheu, E. Gullikson, S. Fischer, B. Nickel, and U. Kleineberg "Attosecond broadband multilayer mirrors for the water window spectral range", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 92070L (5 September 2014); https://doi.org/10.1117/12.2061696
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Mirrors

Interfaces

Polishing

Chromium

Ion beams

Scandium

Reflectivity

RELATED CONTENT

EUV and soft x-ray multilayer optics
Proceedings of SPIE (February 25 2004)
Ion beam sputter deposition of x ray multilayer optics on...
Proceedings of SPIE (September 11 2006)
High performance Cr Sc multilayers for the soft x ray...
Proceedings of SPIE (October 05 2005)
Enhanced reflectivity and stability of Sc/Si multilayers
Proceedings of SPIE (January 13 2004)
High performance Cr Sc multilayers for the soft x ray...
Proceedings of SPIE (January 13 2004)

Back to Top