Damage of EUV optical coatings induced by alpha-particles bombardment

M. G. Pelizzo; S. Zuccon; E. Napolitani; A. J. Corso; P. Zuppella; E. Tessarolo; M. Nardello; F. Gerlin; G. Naletto; S. Fineschi; E. Antonucci

doi:10.1117/12.2062553

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5 September 2014 Damage of EUV optical coatings induced by alpha-particles bombardment

M. G. Pelizzo, S. Zuccon, E. Napolitani, A. J. Corso, P. Zuppella, E. Tessarolo, M. Nardello, F. Gerlin, G. Naletto, S. Fineschi, E. Antonucci

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Proceedings Volume 9207, Advances in X-Ray/EUV Optics and Components IX; 920715 (2014) https://doi.org/10.1117/12.2062553
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Future solar missions will investigate the Sun from very close distances and optical components are constantly exposed to low energy ions irradiation. Single layer thin films as well as extreme ultraviolet multilayer coatings have been exposed to low energy alpha particles (4keV). In order to change the total dose accumulated, for each ion fluency the time of exposure was varied. The experiment was carried out considering typical doses accumulated during the ESA Solar Orbiter mission. Results show that ion implantation affects the performances of both single and multilayer coatings.

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M. G. Pelizzo, S. Zuccon, E. Napolitani, A. J. Corso, P. Zuppella, E. Tessarolo, M. Nardello, F. Gerlin, G. Naletto, S. Fineschi, and E. Antonucci "Damage of EUV optical coatings induced by alpha-particles bombardment", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920715 (5 September 2014); https://doi.org/10.1117/12.2062553

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