Scan Speed Effects In Optical Beam Induced Current Imaging

P. D. Pester; T. Wilson

doi:10.1117/12.968361

1 January 1988 Scan Speed Effects In Optical Beam Induced Current Imaging

P. D. Pester, T. Wilson

Proceedings Volume 0921, Integrated Circuit Metrology, Inspection, and Process Control II; (1988) https://doi.org/10.1117/12.968361
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

We show how the speed of scanning in a scanning optical microscope can affect the beam induced current images of semiconducting samples. Experimental and theoretical results showing the effects of scan velocity are presented.

Citation Download Citation

P. D. Pester and T. Wilson "Scan Speed Effects In Optical Beam Induced Current Imaging", Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); https://doi.org/10.1117/12.968361

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