Translator Disclaimer
Paper
1 January 1988 High-Resolution Imaging Using Focused-Image Holography With Wave-Front Conjugation
Author Affiliations +
Abstract
Experimental results of a high-resolution holographic imaging system using wave-front conjugation are demonstrated. The hologram is created from the information on a master mask that is imaged with a simple single-element lens. The aberrations introduced by the lens are eliminated because the rays retrace the path back-through the lens. The theoretical resolution in the fully coherent imaging system is λ / 2 NA = 0.61 μm ( λ = 488 nm, NA ~0.4). Sub-micrometer resolution of the reconstructed aerial image is experimentally observed over the entire 1 cm diameter field.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ginetto Addiego and William G Oldham "High-Resolution Imaging Using Focused-Image Holography With Wave-Front Conjugation", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); https://doi.org/10.1117/12.968398
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
Back to Top