Fabrication of resonator-quantum well infrared photodetector test devices and focal plane arrays

J. Sun; K. K. Choi; M. D. Jhabvala; C. A. Jhabvala; A. Waczynski; K. Olver

doi:10.1117/12.2061985

10 October 2014 Fabrication of resonator-quantum well infrared photodetector test devices and focal plane arrays

J. Sun, K. K. Choi, M. D. Jhabvala, C. A. Jhabvala, A. Waczynski, K. Olver

Proceedings Volume 9220, Infrared Sensors, Devices, and Applications IV; 922004 (2014) https://doi.org/10.1117/12.2061985
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Resonator-Quantum Well Infrared Photodetectors (R-QWIPs) are the next generation of QWIP detectors that use resonances to increase the quantum efficiency (QE). To achieve the expected performance, the detector geometry must be produced in precise specification. In particular, the height of the diffractive elements (DE) and the thickness of the active resonator must be uniformly and accurately realized to within 0.05 μm accuracy and the substrates of the detectors have to be removed totally. To achieve these specifications, two optimized inductively coupled plasma (ICP) etching processes are developed. Using these etching techniques, we have fabricated a number of R-QWIP test detectors and FPAs with the required dimensions and completely removed their substrates. The QE spectra were tested to be in close agreement with the theoretical predictions. The operability and spectral uniformity of the focal plane array (FPA) is about 99.1% and 3% respectively.

Citation Download Citation

J. Sun, K. K. Choi, M. D. Jhabvala, C. A. Jhabvala, A. Waczynski, and K. Olver "Fabrication of resonator-quantum well infrared photodetector test devices and focal plane arrays", Proc. SPIE 9220, Infrared Sensors, Devices, and Applications IV, 922004 (10 October 2014); https://doi.org/10.1117/12.2061985

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KEYWORDS

Etching

Sensors

Quantum efficiency

Staring arrays

Ions

Plasma

Infrared radiation

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