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17 October 2014 Replicating micro-optical structures using soft embossing technique
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Proceedings Volume 9231, 30th European Mask and Lithography Conference; 92310H (2014) https://doi.org/10.1117/12.2065912
Event: 30th European Mask and Lithography Conference, 2014, Dresden, Germany
Abstract
In this article we report the fabrication of large arrays of micro-optical gratings using soft embossing with elastic Polydimethylsiloxane (PDMS) molds and ultra-violet (UV) curable resins. Three different kinds of resins are used to replicate the master gratings in a process akin to a roll to roll process. The optical surface profiling measurements show that the dimensions of the replicated gratings closely approximate those of the master gratings. Optical diffractions of these gratings are also measured and analyzed.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiaobing Shang, Jin-Yi Tan, Jelle De Smet, Pankaj Joshi, Esma Islamaj, Dieter Cuypers, Michael Vervaeke, Jürgen Van Erps, Hugo Thienpont, and Herbert De Smet "Replicating micro-optical structures using soft embossing technique", Proc. SPIE 9231, 30th European Mask and Lithography Conference, 92310H (17 October 2014); https://doi.org/10.1117/12.2065912
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