Conducting OPC retargeting as guided by principles of classical dynamics

Jingyu Wang; Piyush Verma; Alexander Wei; William Wilkinson

doi:10.1117/12.2067814

8 October 2014 Conducting OPC retargeting as guided by principles of classical dynamics

Jingyu Wang, Piyush Verma, Alexander Wei, William Wilkinson

Author Affiliations +

Proceedings Volume 9235, Photomask Technology 2014; 923507 (2014) https://doi.org/10.1117/12.2067814
Event: SPIE Photomask Technology, 2014, Monterey, California, United States

Abstract

We treat the OPC engine with a classical dynamics perspective, and quantify its potential to converge in all dimensions. The inherent engine weakness is thus taken into account for retargeting planning. Specifically, we follow the one-dimensional helical spring model, and calculate the retarget amount as an analogy to the spring restoring force, and eventually improve the wafer target convergence. Unlike conventional measures, this methodology does not require patching or rebuilding the OPC engine, therefore minimizes the cycle time. Meanwhile, it entails little risk by causing no impact on the mask solution outside the retargeted region, thereby compartmentalizing the treatment.

Citation Download Citation

Jingyu Wang, Piyush Verma, Alexander Wei, and William Wilkinson "Conducting OPC retargeting as guided by principles of classical dynamics", Proc. SPIE 9235, Photomask Technology 2014, 923507 (8 October 2014); https://doi.org/10.1117/12.2067814

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