New grade of 9-inch size mask blanks for 450mm wafer process

Noriyuki Harashima; Hiroyuki Iso; Tatsuya Chishima

doi:10.1117/12.2066075

8 October 2014 New grade of 9-inch size mask blanks for 450mm wafer process

Noriyuki Harashima, Hiroyuki Iso, Tatsuya Chishima

Proceedings Volume 9235, Photomask Technology 2014; 92351M (2014) https://doi.org/10.1117/12.2066075
Event: SPIE Photomask Technology, 2014, Monterey, California, United States

Abstract

6-inch size (known as 6025QZ) binary Cr mask is widely used in the semiconductor lithography for over 20years. Recently for the 450mm wafer process, high grade 9-inch size mask is expected. For this application, we have studied and developed new grade 9-inch size mask blanks for recent 450mm wafer process requirement. There are three types of glass substrates material use and select as 9inch size mask blanks and for required applications by the users. Each glass material has advantage and disadvantage for lithography process as well as wafer process. By knowing the each glass substrate material characteristics and quality level the users enable to select the proper 9inch mask blanks for their targeting applications.

Citation Download Citation

Noriyuki Harashima, Hiroyuki Iso, and Tatsuya Chishima "New grade of 9-inch size mask blanks for 450mm wafer process", Proc. SPIE 9235, Photomask Technology 2014, 92351M (8 October 2014); https://doi.org/10.1117/12.2066075

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available