A novel approach for scanning electron microscopic observation in atmospheric pressure

Yusuke Ominami; Kenji Nakahira; Shinsuke Kawanishi; Tatsuo Ushiki; Sukehiro Ito

doi:10.1117/12.2064935

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16 September 2014 A novel approach for scanning electron microscopic observation in atmospheric pressure

Yusuke Ominami, Kenji Nakahira, Shinsuke Kawanishi, Tatsuo Ushiki, Sukehiro Ito

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Proceedings Volume 9236, Scanning Microscopies 2014; 923604 (2014) https://doi.org/10.1117/12.2064935
Event: SPIE Scanning Microscopies, 2014, Monterey, California, United States

Abstract

Atmospheric scanning electron microscopy (ASEM) for observing samples at ambient atmospheric pressure is introduced in this study. An additional specimen chamber with a thin membrane allowing electron beam propagation is inserted in the main specimen chamber. Close proximity of the sample to the membrane enables the detection of backscattered electrons (BSEs) sufficient for imaging. A probability analysis of the un-scattered fraction of the incident electron beam and the beam profile further supports the feasibility of atmospheric SEM imaging over a controlled membrane-sample distance. An image enhancement method based on the analysis is introduced for the ASEM.

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Yusuke Ominami, Kenji Nakahira, Shinsuke Kawanishi, Tatsuo Ushiki, and Sukehiro Ito "A novel approach for scanning electron microscopic observation in atmospheric pressure", Proc. SPIE 9236, Scanning Microscopies 2014, 923604 (16 September 2014); https://doi.org/10.1117/12.2064935

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