Shear force microscopy using piezoresistive cantilevers in surface metrology

Teodor Gotszalk; Daniel Kopiec; Andrzej Sierakowski; Paweł Janus; Piotr Grabiec; Ivo W. Rangelow

doi:10.1117/12.2066247

16 September 2014 Shear force microscopy using piezoresistive cantilevers in surface metrology

Teodor Gotszalk, Daniel Kopiec, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec, Ivo W. Rangelow

Proceedings Volume 9236, Scanning Microscopies 2014; 92360A (2014) https://doi.org/10.1117/12.2066247
Event: SPIE Scanning Microscopies, 2014, Monterey, California, United States

Abstract

In this article we describe application of piezoresistive cantilevers in surface investigations carried out with the use of shear force microscopy (ShFM). The novel piezoresistive cantilevers integrate a Wheatstone piezoresistive bridge was used to detect the cantilever deflection, thermal deflection detector and planar tip protruding out of the spring beam. Because the planar tip deflection can be detected and controlled electronically the described technology is very flexible and can be applied in many surface investigations. In this article we will present operation theory of the described solution, experimental setup, methods for calibration of the tip deflection detection and actuation The analysis will be illustrated with example results of topography measurements performed using the described technology.

Citation Download Citation

Teodor Gotszalk, Daniel Kopiec, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec, and Ivo W. Rangelow "Shear force microscopy using piezoresistive cantilevers in surface metrology", Proc. SPIE 9236, Scanning Microscopies 2014, 92360A (16 September 2014); https://doi.org/10.1117/12.2066247

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available