A fast high voltage driver for the piezoelectric fast steering mirror

Muwen Fan; Linhai Huang; Mei Li; Changhui Rao; Xi Luo

doi:10.1117/12.2065380

3 February 2015 A fast high voltage driver for the piezoelectric fast steering mirror

Muwen Fan, Linhai Huang, Mei Li, Changhui Rao, Xi Luo

Proceedings Volume 9255, XX International Symposium on High-Power Laser Systems and Applications 2014; 925539 (2015) https://doi.org/10.1117/12.2065380
Event: XX International Symposium on High Power Laser Systems and Applications, 2014, Chengdu, China

Abstract

This paper describes High Voltage Driver (HVD) development for Piezoelectric Fast Steering Mirror (PFSM). Piezoelectric actuator's highly capacitive nature and its influence on high voltage driver are discussed. Since the PFSM tends toward higher speed and larger angle, a multi-paralleling power booster output stage linear high voltage amplifier is described that can output significantly higher current than single output stage linear power amplifier. Test results are presented for a fast high voltage driver that can drive a 300mm diameter PFSM (2.5μF piezoelectric actuator) at 100Hz 1000V_pp, also at 5000Hz 20V_pp.

Citation Download Citation

Muwen Fan, Linhai Huang, Mei Li, Changhui Rao, and Xi Luo "A fast high voltage driver for the piezoelectric fast steering mirror", Proc. SPIE 9255, XX International Symposium on High-Power Laser Systems and Applications 2014, 925539 (3 February 2015); https://doi.org/10.1117/12.2065380

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