Challenges and technical requirements for multi-beam mask writer development

Sang Hee Lee; Jin Choi; Ho June Lee; In Kyun Shin; Shuichi Tamamushi; Chan-Uk Jeon

doi:10.1117/12.2069731

28 July 2014 Challenges and technical requirements for multi-beam mask writer development

Sang Hee Lee, Jin Choi, Ho June Lee, In Kyun Shin, Shuichi Tamamushi, Chan-Uk Jeon

Proceedings Volume 9256, Photomask and Next-Generation Lithography Mask Technology XXI; 925606 (2014) https://doi.org/10.1117/12.2069731
Event: Photomask Japan 2014, 2014, Yokohama, Japan

Abstract

Because mask patterning quality of CD uniformity, MTT, registration and smaller assist feature size is important for wafer patterning, the higher exposure dose and complex pattern design will be necessary. It is the reason why the faster and more accurate e-beam mask writer is needed for future design node. Multi-beam mask writer is the most promising new e-beam mask writer technology for future sub-10nm device mask patterning to solve the pattern quality issue and writing time problem. In this report, the technical challenges of multi-beam mask writer are discussed by comparison with problems of current VSB e-beam mask writer. Comparing with e-beam mask writer which has the critical issues of beam size and position control, the application of entirely different methods and techniques of CD and position control is essential for multi-beam mask writer which has new architecture and writing strategy. Using the simulation method, we present the different challenges between VSB and multi-beam mask writer. And there are many important technical requirements to achieve expected specification of multi-beam mask writer. To understand such requirements, the patterning simulation and mathematical calculation are done for analysis. Based on the patterning simulation, the detail technical requirements and issues of multi-beam mask writer are achieved. Consequently, we suggest the direction of multi-beam mask writer development in terms of technical challenges and requirements.

Citation Download Citation

Sang Hee Lee, Jin Choi, Ho June Lee, In Kyun Shin, Shuichi Tamamushi, and Chan-Uk Jeon "Challenges and technical requirements for multi-beam mask writer development", Proc. SPIE 9256, Photomask and Next-Generation Lithography Mask Technology XXI, 925606 (28 July 2014); https://doi.org/10.1117/12.2069731

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