High quality GaAs nanowires epitaxy on patterned Si substrates

Shiyan Li; Jiaoqing Pan; Xuliang Zhou; Mengke Li; Junping Mi; Xiangting Kong; Jing Bian; Wei Wang

doi:10.1117/12.2071188

13 November 2014 High quality GaAs nanowires epitaxy on patterned Si substrates

Shiyan Li, Jiaoqing Pan, Xuliang Zhou, Mengke Li, Junping Mi, Xiangting Kong, Jing Bian, Wei Wang

Proceedings Volume 9277, Nanophotonics and Micro/Nano Optics II; 927712 (2014) https://doi.org/10.1117/12.2071188
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Epitaxial growth of III-V compound semiconductors on Si has attracted significant attention for many years due to the potential for monolithic integration of III-V based optoelectronic devices with Si integrated circuits. There are three major problems for GaAs monolithic epitaxy on Si, respectively the large lattice mismatch, the difference in thermal expansion coefficient, and growth of a polar material on a nonpolar substrate. Various dislocation reduction techniques have been proposed, such as graded SiGe buffer layers, thermal cycles annealing (TCA), and strained-layer superlattices (SLs) as dislocation filters. Unfortunately, these methods generally require relatively thick epitaxial layers and/or complex epitaxial process. This study relates to the heteroepitaxy of GaAs on nanopatterned Si substrates using the selective aspect ratio trapping method. The dislocations originally generated at the GaAs/Si interface are mostly isolated by the SiO₂ side wall. High-quality GaAs nanowires have been grown on Si(001) substrates by metal-organic chemical vapor deposition. A method of two-step epitaxy of GaAs is performed to achieve a high-quality GaAs layer with a 217 arcsec narrow FWHM of HRXRD. Material quality was confirmed by Scanning electron microscope (SEM) and transmission electron microscopy (TEM). We also simulated the distribution of the light field on the nanoscale GaAs layer surround by Ag films used the FDTD method. The light field confined well in the 250nm width GaAs nanowire which can be used in the nanolasers on Silicon as light sources.

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Shiyan Li, Jiaoqing Pan, Xuliang Zhou, Mengke Li, Junping Mi, Xiangting Kong, Jing Bian, and Wei Wang "High quality GaAs nanowires epitaxy on patterned Si substrates", Proc. SPIE 9277, Nanophotonics and Micro/Nano Optics II, 927712 (13 November 2014); https://doi.org/10.1117/12.2071188

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KEYWORDS

Gallium arsenide

Nanowires

Silicon

Scanning electron microscopy

Epitaxy

Silica

Transmission electron microscopy

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