Plasmonic crystals from 1D to 3D fabricated by focused ion beam milling

Guangyuan Si; Jiangtao Lv; Fengwen Wang

doi:10.1117/12.2073645

13 November 2014 Plasmonic crystals from 1D to 3D fabricated by focused ion beam milling

Guangyuan Si, Jiangtao Lv, Fengwen Wang

Proceedings Volume 9278, Plasmonics; 927812 (2014) https://doi.org/10.1117/12.2073645
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

We show the fabrication of plasmonic crystals from 1D to 3D using focused ion beam milling. As typical examples, 1D gratings with uniform profiles, 2D nanoholes/nanorings and 3D nanostructures with complex geometries are demonstrated, respectively. Our approach may find useful applications in plasmon-related nanophotonics and optics.

Citation Download Citation

Guangyuan Si, Jiangtao Lv, and Fengwen Wang "Plasmonic crystals from 1D to 3D fabricated by focused ion beam milling", Proc. SPIE 9278, Plasmonics, 927812 (13 November 2014); https://doi.org/10.1117/12.2073645

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