The novel method of adhesive bonding in technology of semiconductor fluidic systems

Helena Kłos; Piotr Prokaryn; Andrzej Sierakowski; Maciej Węgrzecki; Jan Bar; Piotr Grabiec

doi:10.1117/12.2070042

19 August 2014 The novel method of adhesive bonding in technology of semiconductor fluidic systems

Helena Kłos, Piotr Prokaryn, Andrzej Sierakowski, Maciej Węgrzecki, Jan Bar, Piotr Grabiec

Proceedings Volume 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors; 929107 (2014) https://doi.org/10.1117/12.2070042
Event: 13th International Scientific Conference on Optical Sensors and Electronic Sensors, 2014, Lodz, Poland

Abstract

The subject of this paper is to describe the novel method of substrates bonding applied in MEMS technology. This method gives a possibility of carrying out bonding processes in standard devices for wafer bonding. It can be applied to chemical, high voltage or high temperature sensitive surfaces. It can be used for bonding substrates with deep etching area with sharp edges and covered with films characterized by low adhesion to the classical materials exploited for photolithography. The main idea of the method is based on two various polymer materials usage. The first material enables to define accurate borders of bonding area, whereas the other guarantees suitable parameters of bonding: firstly the exact adhesion and a stable join and secondly, desirable electrical or thermal parameters.

Citation Download Citation

Helena Kłos, Piotr Prokaryn, Andrzej Sierakowski, Maciej Węgrzecki, Jan Bar, and Piotr Grabiec "The novel method of adhesive bonding in technology of semiconductor fluidic systems", Proc. SPIE 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors, 929107 (19 August 2014); https://doi.org/10.1117/12.2070042

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