Hydrogen gas sensing using palladium-coated microdisk microresonators

Mustafa Eryurek; Yasin Karadag; Nevin Taşaltın; Necmettin Kilinç; Alper Kiraz

doi:10.1117/12.2078244

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3 March 2015 Hydrogen gas sensing using palladium-coated microdisk microresonators

Mustafa Eryurek, Yasin Karadag, Nevin Taşaltın, Necmettin Kilinç, Alper Kiraz

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Proceedings Volume 9343, Laser Resonators, Microresonators, and Beam Control XVII; 93430J (2015) https://doi.org/10.1117/12.2078244
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

An SU-8 polymer microdisk resonator coated with a palladium (Pd) layer and coupled to a single-mode optical waveguide is used to as a hydrogen (H₂) gas sensor. In the presence of H₂, a red shift is observed in the spectral positions of the microdisk whispering gallery modes (WGMs) due to the expansion in the Pd lattice. H₂ concentrations below the flammable limit (4%) down to 0.3% could be detected in nitrogen atmosphere at room temperature. For H₂concentrations between 0.3 − 1%, WGM spectral positions shifted linearly with H2 concentration at a rate of 32 pm/%H₂. Average response time of the devices was measured to be 50 s for 1% H₂. The proposed device concept can also be used to detect different chemical gases by using appropriate sensing layers.

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Mustafa Eryurek, Yasin Karadag, Nevin Taşaltın, Necmettin Kilinç, and Alper Kiraz "Hydrogen gas sensing using palladium-coated microdisk microresonators", Proc. SPIE 9343, Laser Resonators, Microresonators, and Beam Control XVII, 93430J (3 March 2015); https://doi.org/10.1117/12.2078244

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