High-intensity nanosecond all-fiber-coiled laser and extreme ultraviolet generation

Chun-Lin Chang; Yen-Yin Li; Po-Yen Lai; Yi-Ping Lai; Chien-Wei Huang; Shih-Hung Chen; Sheng-Lung L. Huang

doi:10.1117/12.2075546

4 March 2015 High-intensity nanosecond all-fiber-coiled laser and extreme ultraviolet generation

Chun-Lin Chang, Yen-Yin Li, Po-Yen Lai, Yi-Ping Lai, Chien-Wei Huang, Shih-Hung Chen, Sheng-Lung L. Huang

Proceedings Volume 9344, Fiber Lasers XII: Technology, Systems, and Applications; 93440C (2015) https://doi.org/10.1117/12.2075546
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

High-efficiency fiber-based extreme ultraviolet driver in the alignment-free configuration has been experimentally achieved with a maximum intensity of 6.4×10¹⁰ W/cm² on target at a repetition rate of 20 kHz. The output EUV signal within 10~20 nm in wavelength was confirmed with a Si/Zr-coated x-ray photodiode by varying numbers of Be and Al foil filters. The measured spectral range is consistent with that obtained by the weighted oscillator strengths of Sn⁸+ to Sn⁺¹³ions using an one-dimensional hydrodynamic code coupled with the ionization model of collisional-radiative equilibrium. The driver is based on a 1064-nm nanosecond coiled ytterbium all-fiber laser system in diode-seeded master oscillator power amplification. With an overall optical efficiency up to 56%, it can deliver a 1.16-mJ, 117-kW, 6.1-ns laser pulses with a FWHM linewidth of 10 nm and beam propagation factor of M²~1.55. The full advantages of using fiber laser for a movable LPP EUV metrology source are revealed.

Citation Download Citation

Chun-Lin Chang, Yen-Yin Li, Po-Yen Lai, Yi-Ping Lai, Chien-Wei Huang, Shih-Hung Chen, and Sheng-Lung L. Huang "High-intensity nanosecond all-fiber-coiled laser and extreme ultraviolet generation", Proc. SPIE 9344, Fiber Lasers XII: Technology, Systems, and Applications, 93440C (4 March 2015); https://doi.org/10.1117/12.2075546

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