The design of the MD-AME deformable mirror is based on force application on numerous locations. μ-AME actuators are driven by stepper motors, and their patented special design allows controlling the force with a very high accuracy. Materials and assembly method have been adapted to UHV constraints and the performances were evaluated on a first application for a beam with a diameter of 250mm. A Strehl ratio above 0.9 was reached for this application. Optical aberrations up to Zernike order 5 can be corrected with a very low residual error as for standard MD-AME mirror. Amplitude can reach up to several hundreds of μm for low order corrections. Hysteresis is lower than 0.1% and linearity better than 99%. Contrary to piezo-electric actuators, the μ-AME actuators avoid print-through effects and they permit to keep the mirror shape stable even unpowered, providing a high resistance to electro-magnetic pulses.
The deformable mirror design allows changing easily an actuator or even the membrane if needed, in order to improve the facility availability. They are designed for circular, square or elliptical aperture from 30mm up to 500mm or more, with incidence angle from 0° to 45°. They can be equipped with passive or active cooling for high power lasers with high repetition rate.