High-resolution printing of functional microdots by double-pulse laser-induced forward transfer

Aiko Narazaki; Ryozo Kurosaki; Tadatake Sato; Hiroyuki Niino

doi:10.1117/12.2077527

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4 March 2015 High-resolution printing of functional microdots by double-pulse laser-induced forward transfer

Aiko Narazaki, Ryozo Kurosaki, Tadatake Sato, Hiroyuki Niino

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Proceedings Volume 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX; 93500I (2015) https://doi.org/10.1117/12.2077527
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

For high-resolution printing, we have developed a novel way of functional microdots deposition based on laser-induced forward transfer, which is referred to laser-induced dot transfer (LIDT). LIDT is one of promising additive manufacturing techniques because it can realize flexible patterning of micron and submicron-sized dots at atmospheric room-temperature conditions. Recently we have achieved printing of functional oxide microdots by a double-pulse LIDT with the first pulse for preheat and the second pulse for transfer, resulting in more precise control of laser-induced hightemperature and thermal-stress in a source film. In this paper, temporal temperature distributions during the transfer process have been investigated using a finite element method approach. High-resolution printing of functional microdots is promising for future optoelectronic integrations.

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Aiko Narazaki, Ryozo Kurosaki, Tadatake Sato, and Hiroyuki Niino "High-resolution printing of functional microdots by double-pulse laser-induced forward transfer", Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93500I (4 March 2015); https://doi.org/10.1117/12.2077527

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