Glass drilling by longitudinally excited CO2 laser with short laser pulse

Kazuyuki Uno; Takuya Yamamoto; Tetsuya Akitsu; Takahisa Jitsuno

doi:10.1117/12.2077924

4 March 2015 Glass drilling by longitudinally excited CO₂ laser with short laser pulse

Kazuyuki Uno, Takuya Yamamoto, Tetsuya Akitsu, Takahisa Jitsuno

Proceedings Volume 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX; 93501E (2015) https://doi.org/10.1117/12.2077924
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

We developed a longitudinally excited CO₂ laser that produces a short laser pulse. The laser was very simple and consisted of a 45-cm-long alumina ceramic pipe with an inner diameter of 9 mm, a pulse power supply, a step-up transformer, a storage capacitance, and a spark-gap switch. The laser pulse had a spike pulse and a pulse tail. The energy of the pulse tail was controlled by adjusting medium gas. Using three types of CO₂ laser pulse with the same spike-pulse energy and the different pulse-tail energy, the characteristics of the hole drilling of synthetic silica glass was investigated. Higher pulse-tail energy gave deeper ablation depth. In the short laser pulse with the spike-pulse energy of 1.2 mJ, the spike pulse width of 162 ns, the pulse-tail energy of 24.6 mJ, and the pulse-tail length of 29.6 μs, 1000 shots irradiation produced the ablation depth of 988 μm. In the hole drilling of synthetic silica glass by the CO₂ laser, a crack-free process was realized.

Citation Download Citation

Kazuyuki Uno, Takuya Yamamoto, Tetsuya Akitsu, and Takahisa Jitsuno "Glass drilling by longitudinally excited CO₂ laser with short laser pulse", Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93501E (4 March 2015); https://doi.org/10.1117/12.2077924

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available