Thin glass processing with various laser sources

Adam R. Collins; David Milne; Camilo Prieto; Gerard M. O'Connor

doi:10.1117/12.2077217

12 March 2015 Thin glass processing with various laser sources

Adam R. Collins, David Milne, Camilo Prieto, Gerard M. O'Connor

Proceedings Volume 9351, Laser-based Micro- and Nanoprocessing IX; 93511K (2015) https://doi.org/10.1117/12.2077217
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

Laser processing of thin glass has proven problematic due to the inefficient coupling of optical energy into glass and the difficulty achieving an economical processing speed while maintaining cut quality. Laser glass processing is pertinent to touch screen display, microfluidic, microoptic and photovoltaic applications. The results of the laser scribing of 110 μm thick alkali free glass with various laser sources are presented. The laser sources include a CO_₂ laser, nanosecond UV laser and femtosecond IR laser. The contrasting absorption mechanisms are discussed. Cut quality and processing speed are characterised using SEM and optical microscopy techniques. Alternative laser techniques for thin glass processing are also considered.

Citation Download Citation

Adam R. Collins, David Milne, Camilo Prieto, and Gerard M. O'Connor "Thin glass processing with various laser sources", Proc. SPIE 9351, Laser-based Micro- and Nanoprocessing IX, 93511K (12 March 2015); https://doi.org/10.1117/12.2077217

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available