Generation of laser-induced periodic surface structures in indium-tin-oxide thin films and two-photon lithography of ma-N photoresist by sub-15 femtosecond laser microscopy for liquid crystal cell application

Madlen Klötzer; Maziar Afshar; Dara Feili; Helmut Seidel; Karsten König; Martin H. Straub

doi:10.1117/12.2076946

12 March 2015 Generation of laser-induced periodic surface structures in indium-tin-oxide thin films and two-photon lithography of ma-N photoresist by sub-15 femtosecond laser microscopy for liquid crystal cell application

Madlen Klötzer, Maziar Afshar, Dara Feili, Helmut Seidel, Karsten König, Martin H. Straub

Author Affiliations +

Proceedings Volume 9351, Laser-based Micro- and Nanoprocessing IX; 93511O (2015) https://doi.org/10.1117/12.2076946
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

Indium-tin-oxide (ITO) is a widely used electrode material for liquid crystal cell applications because of its transparency in the visible spectral range and its high electrical conductivity. Important examples of applications are displays and optical phase modulators. We report on subwavelength periodic structuring and precise laser cutting of 150 nm thick indium-tin-oxide films on glass substrates, which were deposited by magnetron reactive DC-sputtering from an indiumtin target in a low-pressure oxygen atmosphere. In order to obtain nanostructured electrodes laser-induced periodic surface structures with a period of approximately 100 nm were generated using tightly focused high-repetition rate sub-15 femtosecond pulsed Ti:sapphire laser light, which was scanned across the sample by galvanometric mirrors. Three-dimensional spacers were produced by multiphoton photopolymerization in ma-N 2410 negative-tone photoresist spin-coated on top of the ITO layers. The nanostructured electrodes were aligned in parallel to set up an electrically switchable nematic liquid crystal cell.

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Madlen Klötzer, Maziar Afshar, Dara Feili, Helmut Seidel, Karsten König, and Martin H. Straub "Generation of laser-induced periodic surface structures in indium-tin-oxide thin films and two-photon lithography of ma-N photoresist by sub-15 femtosecond laser microscopy for liquid crystal cell application", Proc. SPIE 9351, Laser-based Micro- and Nanoprocessing IX, 93511O (12 March 2015); https://doi.org/10.1117/12.2076946

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KEYWORDS

Liquid crystals

Electrodes

Photoresist materials

Femtosecond phenomena

Glasses

Nanostructuring

Laser cutting

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