Slot waveguide ring resonators for visible wavelengths in ALD titanium dioxide

Markus Häyrinen; Matthieu Roussey; Antti Säynätjoki; Markku Kuittinen; Seppo Honkanen

doi:10.1117/12.2077413

27 February 2015 Slot waveguide ring resonators for visible wavelengths in ALD titanium dioxide

Markus Häyrinen, Matthieu Roussey, Antti Säynätjoki, Markku Kuittinen, Seppo Honkanen

Proceedings Volume 9365, Integrated Optics: Devices, Materials, and Technologies XIX; 936513 (2015) https://doi.org/10.1117/12.2077413
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Titanium dioxide (TiO2) ring resonators based on slot-waveguides were designed, fabricated and characterized for operating wavelengths in the visible and near infrared regions. The fabrication methods include atomic layer deposition (ALD), electron beam lithography (EBL) and reactive ion etching (RIE). The required narrow slot width (30 nm) was achieved by using a conformal ALD re-coating method, i.e., a feature size reduction technique, after the final etching step. The quality factors of the device were estimated to be 626 at 664 nm wavelength and 3446 at 1516 nm wavelength. The results show that the ALD-TiO₂ is a promising platform for sensing applications for visible wavelengths.

Citation Download Citation

Markus Häyrinen, Matthieu Roussey, Antti Säynätjoki, Markku Kuittinen, and Seppo Honkanen "Slot waveguide ring resonators for visible wavelengths in ALD titanium dioxide", Proc. SPIE 9365, Integrated Optics: Devices, Materials, and Technologies XIX, 936513 (27 February 2015); https://doi.org/10.1117/12.2077413

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available