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27 February 2015 Imec iSiPP25G silicon photonics: a robust CMOS-based photonics technology platform
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Proceedings Volume 9367, Silicon Photonics X; 93670V (2015) https://doi.org/10.1117/12.2076262
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
Silicon photonics has become in the past years an important technology adopted by a growing number of industrial players to develop their next generation optical transceivers. However most of the technology platforms established in CMOS fabrication lines are kept captive or open to only a restricted number of customers. In order to make silicon photonics accessible to a large number of players several initiatives exist around the world to develop open platforms. In this paper we will present imec’s silicon photonics active platform accessible through multi-project wafer runs.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe P. Absil, Peter De Heyn, Hongtao Chen, Peter Verheyen, Guy Lepage, Marianna Pantouvaki, Jeroen De Coster, Amit Khanna, Youssef Drissi, Dries Van Thourhout, and Joris Van Campenhout "Imec iSiPP25G silicon photonics: a robust CMOS-based photonics technology platform", Proc. SPIE 9367, Silicon Photonics X, 93670V (27 February 2015); https://doi.org/10.1117/12.2076262
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