Bending behavior of a flexible single crystal nanomembrane photonic crystal cavity

Xiaochuan Xu; Harish Subbaraman; Ray T. Chen

doi:10.1117/12.2080381

28 February 2015 Bending behavior of a flexible single crystal nanomembrane photonic crystal cavity

Xiaochuan Xu, Harish Subbaraman, Ray T. Chen

Proceedings Volume 9367, Silicon Photonics X; 936716 (2015) https://doi.org/10.1117/12.2080381
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

In this paper, we present experimental and theoretical studies on the bending induced resonance shift of a photonic crystal cavity. The photonic crystal devices are fabricated on a 2cm x 2cm large-area single crystal SiNM which is transferred defect-freely onto a Kapton substrate with an SU-8 bottom cladding. Photonic crystal tapers are implemented at the strip-photonic crystal waveguide interfaces, which lowers the coupling loss and enables operation closer to the band edge. Subwavelength grating (SWG) couplers are employed at the input and output of the device in order to enable device characterization. The device is mounted on the two jaws of a caliper and it can be buckled up and down through sliding one of the jaws. The bending radius at the top of the curvature can be estimated with the length of the specimen and the distance between the two jaws. A minimum bending radius of 5 mm is achieved. Finite element method (FEM) is used to simulate the deformation and the strain of the nanomembrane. The results are used as the input of finite difference time-domain (FDTD) simulation. The analysis shows that the strain sensitivities are 0.673 pm/με, 0.656 pm/με, 0.588 pm/με, and 0.591 pm/με, for longitudinal face-out, longitudinal face-in, transverse face-out, and transverse face-in bending, respectively.

Citation Download Citation

Xiaochuan Xu, Harish Subbaraman, and Ray T. Chen "Bending behavior of a flexible single crystal nanomembrane photonic crystal cavity", Proc. SPIE 9367, Silicon Photonics X, 936716 (28 February 2015); https://doi.org/10.1117/12.2080381

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available