Efficient high NA flat micro-lenses realized using high contrast transmitarrays

Amir Arbabi; Yu Horie; Alexander J. Ball; Mahmood Bagheri; Andrei Faraon

doi:10.1117/12.2079509

27 February 2015 Efficient high NA flat micro-lenses realized using high contrast transmitarrays

Amir Arbabi, Yu Horie, Alexander J. Ball, Mahmood Bagheri, Andrei Faraon

Proceedings Volume 9372, High Contrast Metastructures IV; 93720P (2015) https://doi.org/10.1117/12.2079509
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

We present design, fabrication, and characterization results of high numerical aperture (NA) micro-lenses based on a high contrast transmitarray platform. The high contrast transmitarray is created by periodic arrangement of amorphous silicon posts with different diameters on a fused silica substrate. We report near infrared high NA micro-lenses with spot sizes as small as 0.57λ and focusing efficiencies in excess of 80%. We demonstrate a trade-off relation between NA and efficiency of high contrast array flat micro-lenses, and attribute it to the spatial discretization of their phase profiles.

Citation Download Citation

Amir Arbabi, Yu Horie, Alexander J. Ball, Mahmood Bagheri, and Andrei Faraon "Efficient high NA flat micro-lenses realized using high contrast transmitarrays", Proc. SPIE 9372, High Contrast Metastructures IV, 93720P (27 February 2015); https://doi.org/10.1117/12.2079509

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