Translator Disclaimer
Open Access Paper
26 March 2015 Front Matter: Volume 9375
Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 937501 (2015)
Event: SPIE OPTO, 2015, San Francisco, California, United States
This PDF file contains the front matter associated with SPIE Proceedings Volume 9375 including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

9–12 February 2015

San Francisco, California, United States

Sponsored by SPIE

Cosponsored by

Samsung Advanced Institute of Technology (Korea, Republic of)

Published by


The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from this book:

Author(s), “Title of Paper,” in MOEMS and Miniaturized Systems XIV, edited by Wibool Piyawattanametha, Yong-Hwa Park, Proceedings of SPIE Vol. 9375 (SPIE, Bellingham, WA, 2015) Article CID Number.

ISSN: 0277-786X

ISBN: 9781628414653

Published by


P.O. Box 10, Bellingham, Washington 98227-0010 USA

Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445

Copyright © 2015, Society of Photo-Optical Instrumentation Engineers.

Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/15/$18.00.

Printed in the United States of America.

Publication of record for individual papers is online in the SPIE Digital Library.


Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:

  • The first four digits correspond to the SPIE volume number.

  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc. The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages.


Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Al-Arifi, Fares, 0V

Al-Otaibi, Mohammed, 0V

Angelescu, Dan, 0T

Antila, Jarkko, 0F

Atwood, Bryan, 0H

Baranski, M., 0L

Bargiel, Sylwester, 0L, 0P

Baulig, Claudia, 05

Baumgart, M., 0R

Bayat, D., 0C

Beaulieu, Philippe-Olivier, 07

Benecke, W., 09, 0B, 0O

Berndt, Dirk, 0D

Bleh, Daniela, 0W

Bourouina, Tarik, 0T

Brière, Jonathan, 07

Burger, Benjamin, 0S

Châteauneuf, François, 0G

Chau, Fook Siong, 0I

Chee, J., 0K

Cole, Brian J., 0H

Coutu, Ronald A., 0Y

Dallmann, Hans-Georg, 05, 06

Deng, Jie, 0I

Despont, M., 0C

Drabe, Christian, 0W

Eibelhuber, M., 0N

Eltagoury, Yomna M., 0U, 0V

Flores, Raquel, 12

Frömel, Joerg, 0L, 0P

Gaber, Noha, 0T

Gawlitza, P., 09

Gessner, Thomas, 0P

Glinsner, T., 0N

Goldberg, Lew, 0H

Gorecki, Christophe, 0L, 0P

Grahmann, Jan, 0W

Grasshoff, Thomas, 05

Grüger, Heinrich, 06

Gruhne, C., 09

Gupta, N., 0K

Gu-Stoppel, S., 0B, 0O

Hachtel, Volker, 0A

Hannweber, J., 09

Hassan, Khaled, 0V

Heber, Jörg, 0D

Heinrich, F., 0B

Herrmann, Andreas, 0W

Herwig, P., 09

Hofmann, U., 09, 0O

Horak, Peter, 0Q

Hough, Nathaniel, 0H

Hwu, J., 0K

Ikegami, K., 0M

Janeiro, Ricardo, 12

Janes, J., 09, 0B, 0O

Jin, Zhonghe, 0X

Kamenz, Joerg, 0W

Kantojärvi, Uula, 0F

Kasturi, Abhishek, 0A, 0H

Kenyon, Anthony J., 0Q

Khalil, Diaa, 0T, 0U, 0V

Khalil, Kamal, 0V

Kim, T. S., 0K

Knobbe, Jens, 06

Koyama, T., 0M

Kremer, M. P., 0R

Kubby, J., 0K

Langner, Andreas, 0J

Lani, S., 0C

Lenzhofer, M., 0R

Limkrailassiri, Kevin, 0H

Liu, Huiyun, 0Q

Lullin, Justine, 0P

Ma, Huilian, 0X

Mądzik, Mateusz, 12

Mäkynen, Jussi, 0F

Malak, Maurine, 0T

Mallas, C., 09

Mannila, Rami, 0J

Marty, Frédéric, 0T

Meimon, Serge C., 0S

Menard, Michaël, 07

Merten, André, 0W

Milanović, Veljko, 0A, 0H

Miyamura, Norihide, 0E

Nabki, Frederic, 07

Nettleton, John E., 0H

Ng, Wing H., 0Q

Ngo Phong, Linh, 0G

Nguyen, Minh Chau, 0S

Ortega-Delgado, M., 09

Ostendorf, Ralf, 0W

Oulachgar, Hassane, 0G

Passilly, Nicolas, 0L, 0P

P e ti t, C yri l, 0

S Podoliak, Nina, 0Q

Proulx, Christian, 0G

Pügner, Tino, 06

Quenzer, H.- J., 0B, 0O

Richalot, Elodie, 0T

Rissanen, Anna, 0J

Rückerl, Florian, 0D

Sabry, Yasser M., 0U, 0V

Saidani, Menouer, 07

Saito, T., 0M

Sandner, Thilo, 05

Schelinski, Uwe, 06

Schenk, Harald, 0D

Schwarzenberg, Markus, 05

Schwarzer, Stefan, 05

Senger, F., 09

Shebl, Ahmed, 0U, 0V

Shorte, Spencer, 0D

Sicker, Cornelius, 0D

Soliman, Mostafa, 0U, 0V

Starman, LaVern, 0Y

Stewart, William J., 0Q

Stoppel, F., 0O

Su, Yu, 0H

Suhonen, Janne, 0F

Sun, Hanxu, 0Z

Sun, Ping, 0Z

Taha, Inas, 12

Takemura, Yuto, 0T

Tammi, Matti, 0F

Tian, Feng, 0I

Tinevez, Jean-Yves, 0D

Tortschanoff, A., 0R

Toshiyoshi, H., 0M

Uhrmann, T., 0N

v. Wantoch, T., 09

Velicu, S., 0K

Viegas, Jaime, 12

Viherkanto, Kai, 0J

Wagner, Michael, 0D

Walton, John P., 0Y

Wang, Linglan, 0X

Wang, Wei-Shan, 0L, 0P

Wetzig, A., 09

Wiemer, Maik, 0L, 0P

Wildenhain, Michael, 05

Woittennek, Franziska, 06

Wu, Jiang, 0Q

Wünsch, D., 0L

Yasuda, Y., 0M

Zhang, Jianjie, 0X

Zhao, Wei, 0Z

Zhou, Guangya, 0I

Conference Committee

Symposium Chairs

  • David L. Andrews, University of East Anglia(United Kingdom)

  • Alexei L. Glebov, OptiGrate Corporation (United States)

Symposium Co-chairs

  • Jean-Emmanuel Broquin, IMEP-LAHC (France)

  • Shibin Jiang, AdValue Photonics, Inc. (United States)

Program Track Chairs

  • Holger Becker, microfluidic ChipShop GmbH (Germany)

  • Winston V. Schoenfeld, CREOL, The College of Optics and Photonics, University of Central Florida (United States)

Conference Chairs

  • Wibool Piyawattanametha, King Mongkut’s Institute of Technology Ladkrabang (Thailand) and Chulalongkorn University (Thailand)

  • Yong-Hwa Park, Samsung Advanced Institute of Technology (Korea, Republic of)

Conference Program Committee

  • Wyatt O. Davis, MicroVision, Inc. (United States)

  • David L. Dickensheets, Montana State University (United States)

  • Jean-Christophe Eloy, Yole Développement (France)

  • Jan Grahmann, Fraunhofer-Institut für Photonische Mikrosysteme(Germany)

  • Jason C. Heikenfeld, University of Cincinnati (United States)

  • Ulrich Hofmann, Fraunhofer-Institut für Siliziumtechnologie (Germany)

  • Il-Woong Jung, Argonne National Laboratory (United States)

  • David G. Lishan, Plasma-Therm LLC (United States)

  • Jonathan T. Liu, Stony Brook University (United States)

  • Veljko Milanovic, Mirrorcle Technologies, Inc. (United States)

  • Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)

  • Jason B. Stewart, MIT Lincoln Laboratory (United States)

  • Wanjun Wang, Louisiana State University (United States)

  • Guangya Zhou, National University of Singapore (Singapore)

Session Chairs

  • 1 Miniature Instruments for Endoscopic Microscopy: Joint Session with Conferences 9304 and 9375

    Wibool Piyawattanametha, King Mongkut’s Institute of Technology Ladkrabang (Thailand) and Chulalongkorn University (Thailand)

  • 2 Microscanner I

    Yong-Hwa Park, Samsung Advanced Institute of Technology (Korea, Republic of)

  • 3 Microscanner II

    Guangya Zhou, National University of Singapore (Singapore)

  • 4 MOEMS for Sensing Applications

    Jan Grahmann, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)

  • 5 MOEMS for Imaging Applications

    Wyatt O. Davis, MicroVision, Inc. (United States)

  • 6 MOEMS Components and Systems I

    Ulrich Hofmann, Fraunhofer-Institut für Siliziumtechnologie (Germany)

  • 7 MOEMS Components and Systems II

    David G. Lishan, Plasma-Therm LLC (United States)

© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 9375", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 937501 (26 March 2015);

Back to Top