Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders

Veljko Milanović; Abhishek Kasturi; Bryan Atwood; Yu Su; Kevin Limkrailassiri; John E. Nettleton; Lew Goldberg; Brian J. Cole; Nathaniel Hough

doi:10.1117/12.2082212

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27 February 2015 Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders

Veljko Milanović, Abhishek Kasturi, Bryan Atwood, Yu Su, Kevin Limkrailassiri, John E. Nettleton, Lew Goldberg, Brian J. Cole, Nathaniel Hough

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Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750H (2015) https://doi.org/10.1117/12.2082212
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

A highly compact and low power consuming Q-switch module was developed based on a fast single-axis MEMS mirror, for use in eye-safe battery-powered laser range finders The module’s 1.6mm x 1.6mm mirror has <99% reflectance at 1535nm wavelength and can achieve mechanical angle slew rates of over 500 rad/sec when switching the Er/Yb:Glass lasing cavity from pumping to lasing state. The design targeted higher efficiency, smaller size, and lower cost than the traditional Electro-Optical Q-Switch. Because pulse-on-demand capability is required, resonant mirrors cannot be used to achieve the needed performance. Instead, a fast point-to-point analog single-axis tilt actuator was designed with a custom-coated high reflectance (HR) mirror to withstand the high intra-cavity laser fluence levels. The mirror is bonded on top of the MEMS actuator in final assembly. A compact MEMS controller was further implemented with the capability of autonomous on-demand operation based on user-provided digital trigger. The controller is designed to receive an external 3V power supply and a digital trigger and it consumes ~90mW during the short switching cycle and ~10mW in standby mode. Module prototypes were tested in a laser cavity and demonstrated high quality laser pulses with duration of ~20ns and energy of over 3mJ.

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Veljko Milanović, Abhishek Kasturi, Bryan Atwood, Yu Su, Kevin Limkrailassiri, John E. Nettleton, Lew Goldberg, Brian J. Cole, and Nathaniel Hough "Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750H (27 February 2015); https://doi.org/10.1117/12.2082212

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