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27 February 2015 Integrated packaging of 2D MOEMS mirrors with optical position feedback
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Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750R (2015)
Event: SPIE OPTO, 2015, San Francisco, California, United States
Many applications of MOEMS microscanners rely on accurate position feedback. For MOEMS devices which do not have intrinsic on-chip feedback, position information can be provided with optical methods, most simply by using a reflection from the backside of a MOEMS scanner. By measuring the intensity distribution of the reflected beam across a quadrant diode, one can precisely detect the mirror’s deflection angles. Previously, we have presented a position sensing device, applicable to arbitrary trajectories, which is based on the measurement of the position of the reflected laser beam with a quadrant diode. In this work, we present a novel setup, which comprises the optical position feedback functionality integrated into the device package itself. The new device’s System-in-Package (SiP) design is based on a flip-folded 2.5D PCB layout and fully assembled as small as 9.2×7×4 mm³ in total. The device consists of four layers, which supply the MOEMS mirror, a spacer to provide the required optical path length, the quadrant photo-diode and a laser diode to serve as the light source. In addition to describing the mechanical setup of the novel device, we will present first experimental results and optical simulation studies. Accurate position feedback is the basis for closed-loop control of the MOEMS devices, which is crucial for some applications as image projection for example. Position feedback and the possibility of closed-loop control will significantly improve the performance of these devices.
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Marcus Baumgart, M. Lenzhofer, M. P. Kremer, and A. Tortschanoff "Integrated packaging of 2D MOEMS mirrors with optical position feedback", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750R (27 February 2015);

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