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19 March 2015 Self-actuated, self-sensing cantilever for fast CD measurement
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The conventional optical lever detection technique involves optical components and its precise mechanical alignment. An additional technical limit is the weight of the optical system, in case a top-scanner is used in high speed and high precision metrology. An alternative represents the application of self-actuated AFM cantilevers with integrated 2DEG piezoresistive deflection sensors. A significant improvement in performance of such cantilevers with respect to deflection sensitivity and temperature stability has been achieved by using an integrated Wheatstone bridge configuration. Due to employing effective cross-talk isolation and temperature drift compensation the performance of these cantilevers was significantly improved. In order to enhance the speed of AFM measurements we are presenting a fast cantilever-approach technology, Q-factor-control and novel adaptive scanning speed procedure. Examples of AFM measurements with high scanning speed (up to 200 lines/s) committed to advanced lithography process development are shown.
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Ahmad Ahmad, Tzvetan Ivanov, Alexander Reum, Elshad Guliyev, Tihomir Angelov, Andreas Schuh, Marcus Kaestner, Ivaylo Atanasov, Manuel Hofer, Mathias Holz, and Ivo W. Rangelow "Self-actuated, self-sensing cantilever for fast CD measurement", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240P (19 March 2015);

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