Translator Disclaimer
19 March 2015 Multiple height calibration reference for nano-metrology
Author Affiliations +
Modern nano-metrology instruments require calibration references with nanometer accuracy in the x, y, and z directions. A common problem is the accurate calibration in the z direction (height). For example, it is generally not difficult to obtain accurate x- and y- calibration references for a Scanning Probe Microscope (SPM). It is, however, much more difficult to obtain accurate z-axis results. It is difficult to control z-axis piezo dynamics because during scanning in the xy-plane the x-and y-axes move at a constant rate whiles the z axis does not. Furthermore due to the high cost of producing calibration standards, the microscope is often calibrated at only one height. However, if the relationship between the measured z height and the actual z height is not linear, then the height measurements will not be correct. In this paper, we will present a method for the fabrication of calibration references with: (i) sub-10 nm features and (ii) multiple step heights on one reference, allowing for better calibration of the non-linearity in the z direction.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Christophersen, B. F. Phlips, A. J. Boudreau, and M. K. Yetzbacher "Multiple height calibration reference for nano-metrology", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94240R (19 March 2015);

Back to Top