Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams

Kathleen Hoogeboom-Pot; Jorge Hernandez-Charpak; Travis Frazer; Xiaokun Gu; Emrah Turgut; Erik Anderson; Weilun Chao; Justin Shaw; Ronggui Yang; Margaret Murnane; Henry Kapteyn; Damiano Nardi

doi:10.1117/12.2085615

19 March 2015 Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams

Kathleen Hoogeboom-Pot, Jorge Hernandez-Charpak, Travis Frazer, Xiaokun Gu, Emrah Turgut, Erik Anderson, Weilun Chao, Justin Shaw, Ronggui Yang, Margaret Murnane, Henry Kapteyn, Damiano Nardi

Author Affiliations +

Proceedings Volume 9424, Metrology, Inspection, and Process Control for Microlithography XXIX; 942417 (2015) https://doi.org/10.1117/12.2085615
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Coherent extreme ultraviolet beams from tabletop high harmonic generation offer several revolutionary capabilities for observing nanoscale systems on their intrinsic length and time scales. By launching and monitoring hypersonic acoustic waves in such systems, we characterize the mechanical properties of sub-10nm layers and find that the material densities remain close to their bulk values while their elastic properties are significantly modified. Moreover, within the same measurement, by following the heat dissipation dynamics from 30-750nm-wide nanowires, we uncover a new thermal transport regime in which closely-spaced nanoscale heat sources can surprisingly cool more efficiently than widelyspaced heat sources of the same size.

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Kathleen Hoogeboom-Pot, Jorge Hernandez-Charpak, Travis Frazer, Xiaokun Gu, Emrah Turgut, Erik Anderson, Weilun Chao, Justin Shaw, Ronggui Yang, Margaret Murnane, Henry Kapteyn, and Damiano Nardi "Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 942417 (19 March 2015); https://doi.org/10.1117/12.2085615

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