Hybridization of XRF/XPS and scatterometry for Cu CMP process control

Benoit L'Herron; Robin Chao; Kwanghoon Kim; Wei Ti Lee; Koichi Motoyama; Bartlet Deprospo; Theodorus Standaert; John Gaudiello; Cindy Goldberg

doi:10.1117/12.2086155

19 March 2015 Hybridization of XRF/XPS and scatterometry for Cu CMP process control

Benoit L'Herron, Robin Chao, Kwanghoon Kim, Wei Ti Lee, Koichi Motoyama, Bartlet Deprospo, Theodorus Standaert, John Gaudiello, Cindy Goldberg

Author Affiliations +

Proceedings Volume 9424, Metrology, Inspection, and Process Control for Microlithography XXIX; 94241M (2015) https://doi.org/10.1117/12.2086155
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

This paper demonstrates the synergy between X-rays techniques and scatterometry, and the benefits to combine the data to improve the accuracy and precision for in-line metrology. Particular example is given to show that the hybridization addresses the challenges of aggressive patterning. In 10nm node back-end-of-line (BEOL) integration, we show that the hybridized data between scatterometry and simultaneous X-Ray Fluorescence (XRF) and X-ray Photoelectron Spectroscopy (XPS) provided the closest dimensional correlation to TEM results compared to the individual technique and CDSEM.

Citation Download Citation

Benoit L'Herron, Robin Chao, Kwanghoon Kim, Wei Ti Lee, Koichi Motoyama, Bartlet Deprospo, Theodorus Standaert, John Gaudiello, and Cindy Goldberg "Hybridization of XRF/XPS and scatterometry for Cu CMP process control", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94241M (19 March 2015); https://doi.org/10.1117/12.2086155

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available