Accurate, full chip 3D electromagnetic field model for non-Manhattan mask corners

Michael Lam; Chris H. Clifford; Michael Oliver; David Fryer; Edita Tejnil; Kostas Adam

doi:10.1117/12.2085671

18 March 2015 Accurate, full chip 3D electromagnetic field model for non-Manhattan mask corners

Michael Lam, Chris H. Clifford, Michael Oliver, David Fryer, Edita Tejnil, Kostas Adam

Proceedings Volume 9426, Optical Microlithography XXVIII; 94260P (2015) https://doi.org/10.1117/12.2085671
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

The physical process of mask manufacturing produces absorber geometry with significantly less than 90 degree fidelity at corners. The non-Manhattan mask geometry is an essential contributor to the aerial image and resulting patterning performance through focus. Current state of the art models for corner rounding employ “chopping” a 90 degree mask corner, replacing the corner with a small 45 degree edge. In this paper, a methodology is presented to approximate the impact of 3D EMF effects introduced by corners with rounded edges. The approach is integrated into a full chip 3D mask simulation methodology based on the Domain Decomposition Method (DDM) with edge to edge crosstalk correction.

Citation Download Citation

Michael Lam, Chris H. Clifford, Michael Oliver, David Fryer, Edita Tejnil, and Kostas Adam "Accurate, full chip 3D electromagnetic field model for non-Manhattan mask corners", Proc. SPIE 9426, Optical Microlithography XXVIII, 94260P (18 March 2015); https://doi.org/10.1117/12.2085671

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available