Yield-aware mask assignment using positive semi-definite relaxation in LELECUT triple patterning

Yukihide Kohira; Chikaaki Kodama; Tomomi Matsui; Atsushi Takahashi; Shigeki Nojima; Satoshi Tanaka

doi:10.1117/12.2085285

26 March 2015 Yield-aware mask assignment using positive semi-definite relaxation in LELECUT triple patterning

Yukihide Kohira, Chikaaki Kodama, Tomomi Matsui, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka

Proceedings Volume 9427, Design-Process-Technology Co-optimization for Manufacturability IX; 94270B (2015) https://doi.org/10.1117/12.2085285
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

LELECUT type triple patterning lithography is one of the most promising techniques in the next generation lithography. To prevent yield loss caused by overlay error, LELECUT mask assignment which is tolerant to overlay error is desired. In this paper, we propose a method that obtains an LELECUT assignment which is tolerant to overlay error. The proposed method uses positive semide_nite relaxation and randomized rounding technique. In our method, the cost function that takes the length of boundary of features determined by the cut mask into account is introduced.

Citation Download Citation

Yukihide Kohira, Chikaaki Kodama, Tomomi Matsui, Atsushi Takahashi, Shigeki Nojima, and Satoshi Tanaka "Yield-aware mask assignment using positive semi-definite relaxation in LELECUT triple patterning", Proc. SPIE 9427, Design-Process-Technology Co-optimization for Manufacturability IX, 94270B (26 March 2015); https://doi.org/10.1117/12.2085285

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available